| 发明名称 |
POLYMER-CONTAINING COATING LIQUID APPLIED TO RESIST PATTERN |
| 摘要 |
There is provided a polymer-containing coating liquid which is applied to a resist pattern and which is used in place of a conventional rinsing liquid. A coating liquid that is applied to a resist pattern comprising a polymer having a structural unit of Formula (1):;;(wherein R1 is a C1-12 organic group, and X is an organic group of Formula (2):;;(wherein R2 and R3 are each independently a linear or branched alkylene group having a carbon atom number of 1 to 3, R2 is bonded to an oxygen atom in Formula (1), R4 is a C1-4 alkoxy group, an allyloxy group, or a hydroxy group, and p is 0, 1, or 2)), and a solvent containing water and/or alcohols. |
| 申请公布号 |
US2016363867(A1) |
申请公布日期 |
2016.12.15 |
| 申请号 |
US201515121242 |
申请日期 |
2015.02.03 |
| 申请人 |
NISSAN CHEMICAL INDUSTRIES, LTD. |
发明人 |
Shigaki Shuhei;Sakaida Yasushi;Sakamoto Rikimaru |
| 分类号 |
G03F7/40;H01L21/308;G03F7/38;G03F7/32;G03F7/16;G03F7/20 |
主分类号 |
G03F7/40 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A coating liquid that is applied to a resist pattern comprising a polymer having a structural unit of Formula (1):(wherein R1 is a C1-12 organic group, and X is an organic group of Formula (2):(wherein R2 and R3 are each independently a linear or branched alkylene group having a carbon atom number of 1 to 3, R2 is bonded to an oxygen atom in Formula (1), R4 is a C1-4 alkoxy group, an allyloxy group, or a hydroxy group, and p is 0, 1, or 2)), and a solvent containing water and/or alcohols. |
| 地址 |
Tokyo JP |
