| 摘要 |
<p>PROBLEM TO BE SOLVED: To easily analyze the analyzing region of the surface of a sample to be spectrally analyzed. SOLUTION: The surface of the sample 9 placed on a sample stage 10 is irradiated with ultraviolet rays from an ultraviolet irradiation device 12 to discharge electrons which are, in turn, magnified by the object lens 3 and electrostatic lenses 5, 6 in a lens mirror cylinder 2 to be formed into an image on a two-dimensional detector 16 and the surface of the sample 9 is observed. Electrons discharged by the irradiation with ultraviolet rays from the ultraviolet irradiation device 14 are converged by the electrostatic lenses 4, 5, 6 and apertures 7, 8 in the lens mirror cylinder 2 to pass through the incident slit part 31 formed to the two-dimensional detector 16 to be spectrally diffracted by a semispherical energy analyzer 17 and electrons with specific energy are detected by a detector 18 to analyze the surface of the sample 9.</p> |
