| 摘要 |
This inspection apparatus for semiconductor elements is provided with: a first switch (2), a coil (3), and a second switch (4), which are connected in series to a power supply (1), said first switch having a switching element (2a); a semiconductor element (6) as a subject to be inspected, said semiconductor element being disposed such that the semiconductor element constitutes a loop path with the coil and the second switch when the switching element is turned off, and having a diode element (6a) wherein the cathode electrode is connected to the positive electrode side of the power supply; and a first rectifying element (8) and a second rectifying element (9), which constitute, with the coil, a loop path different from the loop path including the semiconductor element, said second rectifying element being connected in series to the first rectifying element, and performing rectification in the direction reverse to the direction in which the first rectifying element performs rectification. |
