| 摘要 |
<p>An exhaust gas treating device which is capable of reliably removing fluorine compound contained in exhaust gas. This exhaust gas treating device includes a reaction cylinder (3) for thermally decomposing treatment-object substances (for example, NF3) in exhaust gas. This reaction cylinder (3) is internally divided into a first compartment (301) disposed in the center and a second compartment (302) disposed to surround the first compartment (301). The first compartment (301) is connected at one end thereof to an exhaust gas inlet tube (7) and at the other end to one end of the second compartment (302) and includes a main heater (304) therein. The second compartment (302) is connected at the other end thereof to an exhaust gas discharge tube (9) and is peripherally provided with a sub-heater (308). The second compartment (302) is internally filled with a substance (for example, Fe2O3) which accelerates thermal decomposition of the treatment-object substances.</p> |
