发明名称 Method and apparatus for optical modulation
摘要 The present invention is a method and an apparatus for optical modulation, for example for use in optical communications links. In one embodiment, an apparatus for optical modulation includes a first silicon layer having one or more trenches formed therein, a dielectric layer lining the first silicon layer, and a second silicon layer disposed on the dielectric layer and filling the trenches.
申请公布号 US9455372(B2) 申请公布日期 2016.09.27
申请号 US201313743935 申请日期 2013.01.17
申请人 GLOBALFOUNDRIES INC. 发明人 Vlasov Yurii A.;Xia Fengnian
分类号 G02F1/025;G02F1/00;G02F1/01;G02F1/017;H01L33/00 主分类号 G02F1/025
代理机构 Hoffman Warnick LLC 代理人 Cain David;Hoffman Warnick LLC
主权项 1. A method for modulating an optical signal, the method comprising: providing a first silicon layer for guiding the optical signal; providing a dielectric layer adjacent to the first silicon layer, the dielectric layer having a substantially serpentine shape along a cross section perpendicular to a direction of propagation of the optical signal; and applying a voltage sufficient to produce a surface charge along the dielectric layer when the optical signal is propagating through the silicon layer.
地址 Grand Cayman KY