发明名称 |
Method and apparatus for optical modulation |
摘要 |
The present invention is a method and an apparatus for optical modulation, for example for use in optical communications links. In one embodiment, an apparatus for optical modulation includes a first silicon layer having one or more trenches formed therein, a dielectric layer lining the first silicon layer, and a second silicon layer disposed on the dielectric layer and filling the trenches. |
申请公布号 |
US9455372(B2) |
申请公布日期 |
2016.09.27 |
申请号 |
US201313743935 |
申请日期 |
2013.01.17 |
申请人 |
GLOBALFOUNDRIES INC. |
发明人 |
Vlasov Yurii A.;Xia Fengnian |
分类号 |
G02F1/025;G02F1/00;G02F1/01;G02F1/017;H01L33/00 |
主分类号 |
G02F1/025 |
代理机构 |
Hoffman Warnick LLC |
代理人 |
Cain David;Hoffman Warnick LLC |
主权项 |
1. A method for modulating an optical signal, the method comprising:
providing a first silicon layer for guiding the optical signal; providing a dielectric layer adjacent to the first silicon layer, the dielectric layer having a substantially serpentine shape along a cross section perpendicular to a direction of propagation of the optical signal; and applying a voltage sufficient to produce a surface charge along the dielectric layer when the optical signal is propagating through the silicon layer. |
地址 |
Grand Cayman KY |