发明名称 III NITRIDE COMPOUND SEMICONDUCTOR ELEMENT
摘要 <p>PROBLEM TO BE SOLVED: To eliminate the warpage of the laminate of a substrate and a III nitride compound semiconductor layer. SOLUTION: The III nitride compound semiconductor layer having an element function is formed on the surface of a substrate layer formed in a textured structure.</p>
申请公布号 JP2001168386(A) 申请公布日期 2001.06.22
申请号 JP20000041222 申请日期 2000.02.18
申请人 TOYODA GOSEI CO LTD 发明人 ITO JUN;SHIBATA NAOKI;SENDAI TOSHIAKI;SENDA MASANOBU;NOIRI SHIZUYO;ASAMI SHINYA;WATANABE HIROSHI
分类号 H01L33/22;H01L33/32;H01S5/323 主分类号 H01L33/22
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