发明名称 LOGISTICS MANAGEMENT SYSTEM FOR SEMICONDUCTOR PROCESS
摘要 PURPOSE: A logistics management system is provided to apply plural carriers to one LOT ID and to automatically manage the LOT ID and the re-publish of LOT cards. CONSTITUTION: A host(10) collects information from various servers. Herein, a test condition change or process command and data input for an LOT ID is transferred from an operator server(14). The data about a process result for each LOT ID is collected from a process server(16). The data about a test result for each LOT ID is collected from a test server(18). Stored state for an article of each LOT ID is collected from CBS(20,22) by using a carrier. Then, the host decides a carrier for the LOT IDs inputted into CBSs. The information is transferred to an LOT card publisher(24) through the CBS. Then, the LOT card publisher publishes an LOT card for LOT inputted to and outputted from the CBS. Herein, the LOT card is published in inputting and outputting a processed article corresponding to the LOT while being loaded in an AGV(Auto Guided Vehicle)(26) or an LGV(Laser Guided Vehicle)(28) in a stored state in the carriers.
申请公布号 KR20010054803(A) 申请公布日期 2001.07.02
申请号 KR19990055776 申请日期 1999.12.08
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 KIM, DONG IL
分类号 B65G1/04;(IPC1-7):B65G1/04 主分类号 B65G1/04
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