LIQUID CHEMICAL COATING METHOD AND DEVICE THEREFOR

摘要

PROBLEM TO BE SOLVED: To provide a liquid chemical coating method for applying a liquid chemical in a uniform concentration on the whole surface of a substrate. SOLUTION: In the liquid chemical coating method for coating the liquid chemical 2 on the surface 3 while rotating a substrate 1, the liquid chemical 2 is coated in a closed space 27 formed surrounding the substrate 1.