发明名称 CRYSTAL SILICON THIN FILM SEMICONDUCTOR DEVICE
摘要 <p>PROBLEM TO BE SOLVED: To provide a crystal silicon thin film semiconductor device, wherein polycrystalline silicon layer thin films can be easily combined so as to keep the device high in photoelectric conversion efficiency, an inexpensive board material can be used because a board temperature is low, a polycrystalline semiconductor thin film of comparatively large thickness can be formed in a short time, and the device can be lessened in cost and enhanced in quality. SOLUTION: A crystal silicon thin film semiconductor device is characterized by the fact that a first polycrystalline silicon layer 3, which is, at least, partially turned porous, is provided on a substrate 1, and a PN junction is formed in the first polycrystalline silicon layer 3 or between a second polycrystalline silicon layer 4B which is provided coming into contact with the first polycrystalline silicon layer 3 and a third polycrystalline silicon layer 5.</p>
申请公布号 JP2001217442(A) 申请公布日期 2001.08.10
申请号 JP20000028627 申请日期 2000.02.07
申请人 HITACHI CABLE LTD;HITACHI LTD 发明人 MURAMATSU SHINICHI;MINAGAWA YASUSHI;SAKAGUCHI HARUNORI;OKA FUMITO;YAZAWA YOSHIAKI
分类号 H01L21/205;H01L31/04;(IPC1-7):H01L31/04 主分类号 H01L21/205
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