| 摘要 |
PROBLEM TO BE SOLVED: To provide a new tetra(hydroxyphenyl)alkane derivative and the application that increase photosensitivity and/or development speed for photoresist. SOLUTION: An ester of 1,2(or 2,1)-naphthoquinonediazide-4-(or 5-)sulfonic acid and a compound of formula (I) is provided. This compound is used as the photoactive component of the composition of positive photoresist. [Each of R shows H, a 1-4C alkyl group 1-4C alkoxy group,-OCH2C6H5 group, -OC6H5 group or -COO-(1-4C) alkyl group, R1 and R2 show each H, a 1-4C alkyl group, -C6H5 group or alicyclic 5 or 6-membered ring independently mutually, a shows the integer of 0 to 4, m and n show each the integer of 0 to 2 independently]. |
