| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a manufacturing method for a clean article storage body and a storage container for a clean article for substantially storing and carrying the clean article such as a semiconductor wafer while keeping the clean state of the same. SOLUTION: In the manufacturing method for the clean article storage body, the clean article is stored in a carrier 10 to be closed and carried, and a chemical clean air pressurized higher than atmospheric pressure is filled to store the clean article in a sealed state. The storage container 10 is formed of a container to be closed and carried, storing the clean article and filling the chemical clean air pressurized higher than the atmospheric pressure to seal the container.</p> |
