发明名称 WAVELENGTH STABILIZATION FOR AN OPTICAL SOURCE
摘要 A wavelength error for each pulse in a first subset of pulses emitted from an optical source is determined, the wavelength error being the difference between a wavelength for a particular pulse and a target wavelength; a pulse-by-pulse correction signal is determined based on the determined wavelength error, the pulse-by-pulse correction signal including a correction signal associated with each pulse in the first subset of pulses; and a correction based on the determined pulse-by-pulse correction signal is applied to each pulse in a second subset of pulses emitted from the optical source, where applying a correction to a pulse in the second subset of pulses reduces the wavelength error of the pulse in the second subset of pulses.
申请公布号 US2016299441(A1) 申请公布日期 2016.10.13
申请号 US201514681675 申请日期 2015.04.08
申请人 Cymer, LLC 发明人 Ahlawat Rahul
分类号 G03F7/20 主分类号 G03F7/20
代理机构 代理人
主权项 1. A method comprising: receiving a pulsed light beam emitted from an optical source, the pulsed light beam comprising at least a first burst of pulses of light and a second burst of pulses of light, the first burst of pulses comprising a first subset of pulses and the second burst of pulses comprising a second subset of pulses; determining a wavelength error for each pulse in the first subset of pulses, the wavelength error being the difference between a wavelength for a particular pulse and a target wavelength; determining a pulse-by-pulse correction signal based on the determined wavelength error, the pulse-by-pulse correction signal comprising a correction signal associated with each pulse in the first subset of pulses; and applying a correction based on the determined pulse-by-pulse correction signal to each pulse in the second subset of pulses, wherein applying a correction a pulse in the second subset of pulses reduces the wavelength error of the pulse in the second subset of pulses.
地址 San Diego CA US