发明名称 |
WAVELENGTH STABILIZATION FOR AN OPTICAL SOURCE |
摘要 |
A wavelength error for each pulse in a first subset of pulses emitted from an optical source is determined, the wavelength error being the difference between a wavelength for a particular pulse and a target wavelength; a pulse-by-pulse correction signal is determined based on the determined wavelength error, the pulse-by-pulse correction signal including a correction signal associated with each pulse in the first subset of pulses; and a correction based on the determined pulse-by-pulse correction signal is applied to each pulse in a second subset of pulses emitted from the optical source, where applying a correction to a pulse in the second subset of pulses reduces the wavelength error of the pulse in the second subset of pulses. |
申请公布号 |
US2016299441(A1) |
申请公布日期 |
2016.10.13 |
申请号 |
US201514681675 |
申请日期 |
2015.04.08 |
申请人 |
Cymer, LLC |
发明人 |
Ahlawat Rahul |
分类号 |
G03F7/20 |
主分类号 |
G03F7/20 |
代理机构 |
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代理人 |
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主权项 |
1. A method comprising:
receiving a pulsed light beam emitted from an optical source, the pulsed light beam comprising at least a first burst of pulses of light and a second burst of pulses of light, the first burst of pulses comprising a first subset of pulses and the second burst of pulses comprising a second subset of pulses; determining a wavelength error for each pulse in the first subset of pulses, the wavelength error being the difference between a wavelength for a particular pulse and a target wavelength; determining a pulse-by-pulse correction signal based on the determined wavelength error, the pulse-by-pulse correction signal comprising a correction signal associated with each pulse in the first subset of pulses; and applying a correction based on the determined pulse-by-pulse correction signal to each pulse in the second subset of pulses, wherein applying a correction a pulse in the second subset of pulses reduces the wavelength error of the pulse in the second subset of pulses. |
地址 |
San Diego CA US |