WAVEGUIDE FOR AN ELECTRO-OPTIC CAPACITIVE MODULATOR

摘要

A waveguide including a substrate, an assembly of semiconductor regions consecutively extending on the substrate along a direction corresponding to a propagation direction of an electromagnetic wave having a wavelength noted λ, the semiconductor regions being electrically alternately doped with a first conductivity type and with a second conductivity type along the propagation direction, a dielectric layer interposed between two consecutive semiconductor regions, at least one pair of consecutive elementary structures having a dimensions along the propagation direction adapted to λ, to form, a grating where the light propagates with, no diffraction effects,

主权项

1. A waveguide for a capacitive electro-optic modulator, the waveguide being intended to be coupled with at least one light source emitting an electromagnetic wave along a propagation direction, the electromagnetic wave having a wavelength noted λ, the waveguide comprising:
a substrate; an assembly of semiconductor regions consecutively extending on the substrate along the propagation direction of the electromagnetic wave, the semiconductor regions being electrically alternately doped with a first conductivity type and with a second conductivity type along the propagation direction: an assembly of dielectric layers, each dielectric layer being formed between two consecutive semiconductor regions; the assembly of semiconductor regions and the assembly of dielectric layers forming a grating of elementary structures consecutively comprising a first elementary structure formed by a semiconductor region of the first conductivity type and an adjacent dielectric layer, and a second elementary structure formed by a semiconductor region of the second conductivity type and an adjacent dielectric layer: the first and second elementary structures respectively having first and second dimensions LA, LB along the propagation direction; a medium surrounding the grating, the medium having a light line; the first dimensions LA and the second dimensions LB, of the elementary structures being adapted to so that the grating authorizes optical modes propagating along the propagation direction, and so that the optical modes authorized by the grating are located under the light line