| 摘要 |
PROBLEM TO BE SOLVED: To provide a light quantity adjusting device capable of the high-speed adjustment of a light quantity and intermittence control. SOLUTION: On an exit beam path of a laser beam from a laser generation source 1, a minute mirror array 4 is arranged in which many minute mirrors are aligned in a grid shape on the same plane and each minute mirror is turning controlled individually, by performing the turning control of the individual minute mirrors of the minute mirror array 4 simultaneously or alternatively, the quantity of reflected light of the beam projected from the laser generation source 1 is changed to adjust the light quantity.
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