| 摘要 |
<p>PROBLEM TO BE SOLVED: To stably perform a laser beam machining accurately and precisely by decreasing a variation in an electrostatic capacity due to a plasma generated in the course of the laser beam machining. SOLUTION: The laser beam machining nozzle 10, used for machining a work 4 with a laser beam 5 performed by measuring the electrostatic capacity between the tip of the laser machining nozzle 10 and the work 4 and controlling the distance between the laser beam machining nozzle 10 and the work 4 on the basis of the electrostatic capacity, is provided with a through-hole through which the laser beam 5 passes, an insulated nozzle part 2 formed of an insulating body and provided at the nozzle tip part of the laser beam machining nozzle 10, and a sensor electrode 3 which is placed opposite to the work 4 and on the outer peripheral side of the insulated nozzle part 2 and measures the electrostatic capacity between the nozzle and the work 4.</p> |
