| 摘要 |
PURPOSE: To provide a power supply current measuring unit arranged on a semiconductor test system and capable of accurately measuring the power supply current of a device under test at a high speed. CONSTITUTION: This power supply current measuring unit comprises a D-A converter generating the power supply voltage to be fed to the device under test based on an inputted digital signal, an arithmetic amplifier forming a negative feedback loop, applying the power supply voltage from the D-A converter to the power supply pin of the device under test, and feeding the power supply current to the power supply pin through a measuring resistor having a known value, a voltage amplifier amplifying the voltage value indicating the power supply current value fed to the device under test by the arithmetic amplifier, an integrating circuit for integrating the output signal of the voltage amplifier over the prescribed time, and an A-D converter converting the output signal of the integrating circuit into a digital signal after the prescribed time elapses.
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