| 摘要 |
PURPOSE: To ensure rigidity with respect to a vertical load, while reducing planar size. CONSTITUTION: The bond stage driver comprises a motor 11 for a Z drive table secured to an XY table 1 or a &thgr;-axis drive means 2, a Z-drive table 12 being rotated by the motor 11 for the Z-drive table, a cam 14 having a plurality of inclining parts 13 secured to the Z-drive table 12, and a plurality of cam followers 21 provided on a bond stage 18, in correspondence with respective inclining parts 13 to come into pressure contact therewith, where the bond stage 18 is set movable vertically along the profile of the inclining part 13 by the rotation of the Z-drive table 12.
|
