发明名称 SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
摘要 <p>PROBLEM TO BE SOLVED: To provide a semiconductor device capable of obtaining an excellent heterojunction characteristic at low temperatures, and a method of manufacturing the same. SOLUTION: The method of manufacturing comprises a step of dipping an n-type single-crystal silicon semiconductor substrate 11 in a solution 13 of a cyano compound to introduce cyano ions onto the surface of the substrate, and a step of laminating an n-type or a p-type amorphous silicon thin film 15 (17) on the n-type substrate 11 to form the heterojunction by allowing an nondoped amorphous silicon thin film 14 (16) to intervene.</p>
申请公布号 JP2001339084(A) 申请公布日期 2001.12.07
申请号 JP20000158136 申请日期 2000.05.29
申请人 SANYO ELECTRIC CO LTD 发明人 TAGUCHI MIKIAKI
分类号 H01L21/306;H01L31/04;(IPC1-7):H01L31/04 主分类号 H01L21/306
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