发明名称 METHOD FOR MANUFACTURING GALLIUM NITRIDE COMPOUND SEMICONDUCTOR LIGHT EMITTING ELEMENT
摘要 PROBLEM TO BE SOLVED: To provide a method for manufacturing a gallium nitride compound semiconductor light emitting element having excellent reliability and mass productivitty without machining a substrate or without including a complicated step such as manufacturing step of a contact hole. SOLUTION: The method for manufacturing a semiconductor light emitting element contains an N-type gallium nitride compound semiconductor, an I layer 36 made of a semi-insulating gallium nitride compound semiconductor, and an electrode 40 comprises the steps of forming the electrode 40 on at least the layer 36, and then heat treating the electrode.
申请公布号 JP2002026390(A) 申请公布日期 2002.01.25
申请号 JP20010132240 申请日期 2001.04.27
申请人 TOYOTA CENTRAL RES & DEV LAB INC;TOYODA GOSEI CO LTD 发明人 OZAWA TAKAHIRO
分类号 H01L29/43;H01L21/28;H01L21/324;H01L33/32;H01L33/40 主分类号 H01L29/43
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