发明名称 |
APPARATUS AND METHOD FOR SCANNING A SURFACE |
摘要 |
Apparatus and method for scanning a surface. An optical system generates a light beam to illuminate a surface. A carrier supports the surface for reciprocating motion with respect to the light beam to form one axis of a raster. A propulsion system moves the carrier at a substantially constant speed and a position sensor provides an output signal representing the surface position with respect to the light beam. A control system responsive to the output signal modulates a sample period reciprocally to carrier speed to achieve substantially constant scan length per sample and to control data acquisition timing.
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申请公布号 |
US2002017562(A1) |
申请公布日期 |
2002.02.14 |
申请号 |
US19990317654 |
申请日期 |
1999.05.24 |
申请人 |
SADLER JOHN W.;DORSEL ANDREAS N.;STATON KENNETH L. |
发明人 |
SADLER JOHN W.;DORSEL ANDREAS N.;STATON KENNETH L. |
分类号 |
G01N21/64;(IPC1-7):G06K7/10 |
主分类号 |
G01N21/64 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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