发明名称 PROCESSING SOLUTION DISCHARGING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a processing solution discharging device which can effectively prevent liquid from dripping from a nozzle body after intercepting supply of the processing solution. SOLUTION: At least one joint 2 provided with a pipe tunnel 2d is fixedly installed at a lower end part of a supply pipe 122 in which a hollow part 122a is connected with a processing solution supply source and a nozzle body 123 is joined to a lower end part of each joint 2 by a screw connection. The joint 2 is fixedly installed at the supply pipe 122 in a state where an end part 2a thereof penetrates the pipe wall of a lower part of the supply pipe 122 from the outside and is inserted into he hollow part 122a.
申请公布号 JP2002079142(A) 申请公布日期 2002.03.19
申请号 JP20000269255 申请日期 2000.09.05
申请人 SUMITOMO PRECISION PROD CO LTD 发明人 MIZUKAWA SHIGERU;MURATA TAKASHI;NAKADA KATSUTOSHI;MATSUMOTO SHUNJI
分类号 G03F7/30;B05B1/20;B08B3/02;H01L21/027;(IPC1-7):B05B1/20 主分类号 G03F7/30
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