发明名称 |
PROCESSING SOLUTION DISCHARGING DEVICE |
摘要 |
PROBLEM TO BE SOLVED: To provide a processing solution discharging device which can effectively prevent liquid from dripping from a nozzle body after intercepting supply of the processing solution. SOLUTION: At least one joint 2 provided with a pipe tunnel 2d is fixedly installed at a lower end part of a supply pipe 122 in which a hollow part 122a is connected with a processing solution supply source and a nozzle body 123 is joined to a lower end part of each joint 2 by a screw connection. The joint 2 is fixedly installed at the supply pipe 122 in a state where an end part 2a thereof penetrates the pipe wall of a lower part of the supply pipe 122 from the outside and is inserted into he hollow part 122a. |
申请公布号 |
JP2002079142(A) |
申请公布日期 |
2002.03.19 |
申请号 |
JP20000269255 |
申请日期 |
2000.09.05 |
申请人 |
SUMITOMO PRECISION PROD CO LTD |
发明人 |
MIZUKAWA SHIGERU;MURATA TAKASHI;NAKADA KATSUTOSHI;MATSUMOTO SHUNJI |
分类号 |
G03F7/30;B05B1/20;B08B3/02;H01L21/027;(IPC1-7):B05B1/20 |
主分类号 |
G03F7/30 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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