FINE PATTERN FORMING APPARATUS, METHOD FOR MANUFACTURING FINE NOZZLE AND METHOD FOR FORMING FINE PATTERN

摘要

PROBLEM TO BE SOLVED: To provide a fine pattern forming apparatus capable of forming a fine pattern with high-precision by direct drawing with ink, a method for manufacturing a fine nozzle which such fine pattern forming apparatus is equipped with, and a method for forming a fine pattern. SOLUTION: A silicon substrate 2 which is equipped with a plurality of fine holes which penetrate through the fine pattern forming apparatus from its front surface to its rear surface and have a silicon dioxide layer 4 on their walls is provided. Fine nozzles 5 which protrude from the rear surface of the silicon substrate through openings 3a of the fine holes integrally with the silicon dioxide layer, a silicon nitride 6 formed on the front surface 2A and the sides 2C of the silicone substrate, a supporting member 7 arranged on the front surface side of the silicon substrate, an ink flow passage 8 to supply ink to the openings of the fine holes on the front surface side of the silicon substrate, and an ink supplying apparatus 9 connected to the ink flow passage are also provided.