FRAGILE SUBSTRATE BREAKING METHOD AND DEVICE THEREFOR

摘要

PROBLEM TO BE SOLVED: To solve such a problem that a fragile substrate must be inverted when breaking the scribed fragile substrate in a conventional machining system. SOLUTION: A closed space covering a region including a scribe line formed on an upper face of the fragile substrate at the center and having a predetermined width is created, and a pressure in the closed space is reduced to break the fragile substrate by curving it slightly into a reverse V shape.