INK JET HEAD AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide an ink jet head and its manufacturing method in which the number of ink jet heads being taken from one wafer is high and extremely high productivity is exhibited. SOLUTION: A plurality of rows of grooves are made in parallel in a substrate including a piezoelectric element from the piezoelectric element side and a driving wall comprising the piezoelectric element and a channel part are formed alternately by bonding a cover substrate to the groove side. A driving electrode is formed on the driving wall and when an electric field is applied to each driving wall, the driving wall undergoes shearing deformation to eject ink in the channel part. In such an ink jet head, the cover substrate is provided with a through hole corresponding to each channel part and the electrode provided on the upper surface of the cover substrate is connected with the driving electrode through a through hole.