| 摘要 |
The present invention provides a capacitor structure comprising an array having two dimensions and having first and second electrode elements alternating in both dimensions of the array, the first electrode elements interconnected and the second electrode elements interconnected, to cause the array to function as a capacitor. The capacitor structure further comprises a dielectric material, which in one embodiment may be silicon dioxide (SiO2), separating the first and second electrode elements in both of the dimensions. In one embodiment of the invention, the first electrode elements are interconnected by a first interconnect, and the second electrode elements are interconnected by a second interconnect, allowing the first and second electrode elements to function as an interdigitated capacitor.
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