| 摘要 |
PURPOSE: A vaporizer and an apparatus for vaporizing and supplying are provided to be capable of efficiently vaporizing a CVD material at a desirable concentration and flow rate without causing deposit or adhesion of the solid material in the CVD material feed port, even in the case of employing a solid CVD- material. CONSTITUTION: The vaporizer comprises a vaporization chamber(5) for a CVD material, a CVD material feed portion(6) for supplying the vaporization chamber with the CVD material, a vaporized gas exhaust port(7) and a heating means(8) for heating the vaporization chamber, characterized in that at least a portion of the CVD material feed portion in contact with the CVD material is constituted of a corrosion resistant synthetic resin.
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