发明名称 RESONATOR FOR ULTRASONIC VIBRATION BONDING
摘要 PROBLEM TO BE SOLVED: To improve economical efficiency by utilizing both of bonding-action parts installed at the top and bottom of a resonator. SOLUTION: The resonator 1 has the bonding-action parts 3 and 4 installed up and down at an equal distance H1 from a center line L2 extending in the long direction of a horn main body 2 between the upper part and the lower part of the horn main body 2, attachment faces 6 and 7 of supporting parts 5 installed at the outside of the horn main body 2 positioned up and down at an equal distance H2 from the center line L2, and suction side openings 10 and 11 of the passages 8 and 9 being vacuum-chucking function parts separately installed up and down at an equal distance H3 from the center line L2 in the inside of the horn main body 2, and at the one time, two bonding objective materials 12 and 13 are bonded under ultrasonic vibration by using the one bonding-action part 3 and at the other time, the above materials 12 and 13 are bonded by using the other bonding-action part 4 through turning the resonator 1 upside down.
申请公布号 JP2002177881(A) 申请公布日期 2002.06.25
申请号 JP20000376536 申请日期 2000.12.11
申请人 ARUTEKUSU:KK 发明人 SATO SHIGERU;NAKAI SEIYA
分类号 B06B1/02;H01L21/60;H01L21/607;(IPC1-7):B06B1/02 主分类号 B06B1/02
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