发明名称 Method for forming memory array having a digit line buried in an isolation region
摘要 A memory array includes a semiconductor substrate, an isolation trench disposed in the substrate, and a conductor that is disposed in the trench. The array also includes a memory cell that is coupled to the conductor in the trench. The conductor may be a digit line that is coupled to a source/drain region of the memory cell or to a shared source/drain region of a pair of adjacent memory cells.
申请公布号 US6417040(B2) 申请公布日期 2002.07.09
申请号 US20010900341 申请日期 2001.07.05
申请人 MICRON TECHNOLOGY, INC. 发明人 NOBLE WENDELL
分类号 H01L21/8242;H01L27/108;(IPC1-7):H01L21/823 主分类号 H01L21/8242
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