| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate positioning device capable of easily moving a support pin at the time of exchanging a substrate stage. SOLUTION: In this substrate positioning device (50a) having a substrate supporting means (60a) and a substrate fixing means (70) for fixing the supported substrate, the substrate supporting means is provided with a support base (3a) having a plurality of positioning holes (32) accompanied with spot facing parts (32a), a support pin (2a) whose one edge is butted to the substrate so that the substrate can be supported, and whose other edge is connected through an elastic body (33) to the support base, and an elevating means (4) for elevating the support base and the support pin. |
