| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a laser irradiating device which leaves an elongated region which is not irradiated with a laser beam by moving a beam spot of the laser beam and shortens an irradiation time in the irradiation of the other region with the laser beam. SOLUTION: A laser beam source for machining emits a laser beam for machining. A mask is disposed in an optical path of the laser beam for machining which is emitted from the laser beam source for machining. At least two transmission regions are formed on the mask and, between the two transmission regions, a light shielding region is demarcated. A stage retains an object to be irradiated. An image formation optical device guides the laser beam which is transmitted by the mask to the object to be irradiated, held on the stage and imagines the light shielding region of the mask on the surface of the object to be irradiated.</p> |
