| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a low cost optical modulator having a simple structure of conducting optical modulation by changing reflection direction of the incident light, high responsiveness and few manufacturing processes in which wavelength of incident light to be used is not restricted, and whose operation is stable and whose reliability is high, and a manufacturing method of the optical modulator. SOLUTION: The optical modulator consists of both end supported beam 2 that is formed with the thin film which combines and constitutes the light reflection film 1 in one surface, and both ends of which are fixed, and which is deformed by the electrostatic force, a substrate electrode 3 which applies the driving voltage oppositely to the beam 2 through the gap G formed in the other surface of the beam 2, a facing surface 3a in which the electrode 3 opposes to the beam 2 which conducts optical modulation of the incident light of a reflection means 1 by regulating deformation of the beam 2 due to an application of the driving voltage of the electrode 3 by contact, and a base board 4 which forms the electrode 3 consisting of the facing surface 3a in recessed part 4a and holds a part to be held 2a of the beam 2.</p> |
