METHOD FOR CONTROLLING FLOW RATE AND MICRO-VALVE TO BE USED FOR THE METHOD

摘要

PROBLEM TO BE SOLVED: To provide a new method capable of controlling the flow rate of a fine passage by utilizing the physical property of fluid itself flowing through the passage without using a mechanical element or a special material. SOLUTION: A fine passage is closed by solids generated by cooling a fluid reversibly capable of phase transition between solid and liquid under a heat less than a phase transition point while allowing the fluid to flow into a fine passage formed by grooving an adiabatic solid substrate and the solid is heated more than the phase transfer point to open the passage to control the flow rate of fluid in the fine passage. A micro-valve to be used for the control of the flow rate is constituted of the fine passage formed by grooving the adiabatic solid substrate, the fluid filled in the passage and reversibly capable of phase transition between solid and liquid and a temperature control means capable of heating and cooling the fluid arranged on a proper position in the fine passage.