发明名称 |
Integrated alignment and calibration of optical system |
摘要 |
A calibration system within an optical inspection apparatus comprising a sensor, lens, fiducials, and a CPU. The CPU is configured to receive information from the sensor relating to the fiducial coordinate system and the sensor coordinate system, and the fiducials are used to determine a physical relationship between the sensor coordinates and fiducial coordinates. The calibration system has a means for calibrating the inspection system and measuring critical dimensions of an object in an accurate manner on-the-fly without additional set-up or manual calibration of the system.
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申请公布号 |
US2002113970(A1) |
申请公布日期 |
2002.08.22 |
申请号 |
US20010039249 |
申请日期 |
2001.10.24 |
申请人 |
BALDWIN LEO B.;EVANS FRANK G. |
发明人 |
BALDWIN LEO B.;EVANS FRANK G. |
分类号 |
G01B11/03;G01B11/27;G01N21/88;G01N21/956;(IPC1-7):G01B11/00 |
主分类号 |
G01B11/03 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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