| 摘要 |
PURPOSE: A positioning unit and a positioning apparatus are provided to use an accelerating nanodrive by firmly connecting runner with a module and exerting accelerations higher than 10G. CONSTITUTION: A positioning unit(1) includes an accelerating nanodrive(2), which has a resolution of at least 10nm, a slider(5) and a module(6,7), which has a stationary component(6) and a component(7) movable for this purpose. The component(7) has a mass of less than 500g and is movably supported relative to the drive(2). The slider(5) and the movable component(7) of the module(6,7) are securely connected one to the other and the drive(2) can exert accelerations higher than 10G.
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