SEMICONDUCTOR MANUFACTURING APPARATUS HAVING ULTRASONIC GENERATOR

摘要

PURPOSE: A semiconductor manufacturing apparatus having an ultrasonic generator is provided to prevent a power adsorption by generating an ultrasonic wave. CONSTITUTION: A semiconductor manufacturing apparatus comprises a process tube(200), a chamber(220), a pipe(230), a pump(240) for making the pipe(230) a vacuum state, a gas injection pipe(210) for supplying a reactive gas to the chamber(220) of the process tube(200) and a main valve(260) for controlling the pressure of the inner space of the pipe(230). The semiconductor manufacturing apparatus further includes an ultrasonic generator(280) connected with the pipe(230) for generating an ultrasonic wave into the pipe(230) and a controller(290) connected with the ultrasonic generator(280) for automatically controlling the frequency of the ultrasonic wave.