| 摘要 |
PROBLEM TO BE SOLVED: To provide a gas-liquid separating membrane for a diaphragm type chemical sensor, which is easily bonded to a sensor body even when the sensor is micronized, is adaptive to production, does not warp, keeps the rigidity and the satisfactory gas permeability and surely holds an internal liquid. SOLUTION: Two silicon substrates are bonded to each other. A gas- permeable pore is prepared by forming a submicron shallow groove concavely along the bonded surface on any of the bonded surfaces. Through-holes through which gas can entrance and exit are formed on each of the silicon substrates so that the through-holes on one silicon substrate are made to communicate with those on the other silicon substrate through the shallow groove. The vicinity of the part of the through-hole on any of the silicon substrates to be connected with the shallow groove is treated to have water repellence. Thereby, the objective gas-liquid separating membrane is obtained. As a result, the obtained gas-liquid separating membrane shows excellent gas permeability and excellent sensitivity, holds the internal liquid surely, keeps the rigidity and is adaptive to mass production. |
