PHOTOSENSITIVE POLYIMIDE PRECURSOR COMPOSITION

摘要

PROBLEM TO BE SOLVED: To provide a photosensitive polyimide precursor composition having high sensitivity, a high yield of a residual film and high resolution. SOLUTION: The photosensitive polyimide precursor composition has (a) a polyimide precursor having carbon-carbon double bonds dimerizable or polymerizable with actinic radiation, (b) an aromatic nitroso compound having one or more phenolic hydroxyl groups represented by the formula ON-R<1> -(OH)p (where R<1> is a 1-30C organic group containing one or more aromatic rings, the hydroxyl and nitroso groups bond directly to the aromatic rings and (p) is an integer of 1-3) and (c) a titanocene compound.