Pixel array for LC silicon light valve featuring pixels with overlapping edges

摘要

The present invention provides a pixel array and a process flow for forming an array of pixel cells that features pixel electrodes having overlapping edges. This overlapping pixel configuration precludes absorption of light in inter-pixel regions that could give rise to the appearance of dark lines between bright reflective pixel electrodes. This pixel arrangement also prevents the disruption of charge stored in underlying capacitor structures due to the penetration of incident light through inter-pixel regions into the underlying substrate.