发明名称 Thin-film magnetic head wafer and manufacturing method of thin-film magnetic head
摘要 A thin-film magnetic head wafer with a surface to be exposed by means of an optical stepper includes a plurality of thin-film magnetic head elements formed on the surface, and distance check regions that are flat in level and horizontal to the surface of the wafer, at least one of the distance check regions being formed on the surface within one exposure area of the optical stepper.
申请公布号 US2002151118(A1) 申请公布日期 2002.10.17
申请号 US20020163514 申请日期 2002.06.07
申请人 TDK CORPORATION 发明人 KAMIJIMA AKIFUMI
分类号 G03F9/00;(IPC1-7):H01L21/00;H01L21/84 主分类号 G03F9/00
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