| 摘要 |
PURPOSE: Provided is an X-ray mask apparatus equipped with a micro actuator for operating X-ray mask directly in the LICGA process and producing three dimensional structure precisely. CONSTITUTION: The X-ray mask apparatus equipped with a micro actuator contains the parts of: a mask part forming an X-ray absorbent(12), a membrane structure(11) and substrate, in turns; a mask holder part(20) to support the mask part; several elastic supporters(31) between a mask and a mask holder for moving the mask part freely; a micro actuator part to control the position of mask closely due to electric powder applied to electrodes(32) which have a comb shape, forming crossly at regular intervals, between outside of the mask and inside of mask holder. The electrodes comprise two electrodes, a static electrode(33) and a dynamic(34) electrode formed on the mask holder part and the mask part, respectively.
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