| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a frame for a pellicle on which a pellicle film can be stretched, adhered and supported, and in particular, to provide such a frame that when a pellicle film is stretched and adhered to the frame, each side line of the frame can be suppressed from distorting inward. SOLUTION: The frame 1 is composed of a pair of long side lines 1a and a pair of short side lines 1b where a pellicle film 2 can be stretched over, adhered and supported. The frame has such a structure that the cross section in each corner of the frame 1 gradually and continuously increases from the cross section of the center part.</p> |
