METHOD FOR MANUFACTURING RESISTIVE ELEMENT, METHOD FOR MANUFACTURING PRESSURE SENSOR ELEMENT, PRESSURE SENSOR ELEMENT, PRESSURE SENSOR, ALTIMETER, ELECTRONIC APPARATUS, AND MOVING OBJECT

摘要

A method for manufacturing a resistive element includes: preparing a substrate including an n-type silicon layer; doping the silicon layer with an impurity to thereby form a resistive region; heat-treating the resistive region by any of rapid thermal annealing, flash lamp annealing, and excimer laser annealing; and epitaxially growing silicon on the resistive region to thereby form a covering layer.

主权项

1. A method for manufacturing a resistive element, comprising:
preparing a substrate including a silicon layer including an n-type or p-type region; doping the region with an impurity to thereby form a resistive region; heat-treating the resistive region by any of rapid thermal annealing, flash lamp annealing, and excimer laser annealing; and epitaxially growing silicon on the resistive region to thereby form a covering layer.