SYSTEM AND METHOD FOR MANAGING PRODUCTION

摘要

PROBLEM TO BE SOLVED: To prepare an accurate measurement schedule in accordance with the irregularity of a measuring time that fluctuates due to a yield in a measuring process of a wafer. SOLUTION: A server 1 acquires a progress situation of a pre-stage from a process management database 3 and calculates an in-process schedule to a lot to be a measurement object. The server 1 also acquires a distribution of past measuring times and a mean yield from a measurement information database 5 and calculates a measuring time with the mean yield of the lot to be a measurement object. A measurement schedule is prepared from the calculated in-process schedule and measuring time.