DISPLAY METHOD OF IMAGE IN CHARGED PARTICLE BEAM SYSTEM, THE CHARGED PARTICLE BEAM SYSTEM, DISPLAY METHOD OF IMAGE IN ANALYZER, AND THE ANALYZER

摘要

PROBLEM TO BE SOLVED: To provide a charged particle beam system or an analyzer that facilitates a comparative observation of an image, by displaying a plurality of different types of images of the same visual field simultaneously on a display, and to provide a display method for an image in the devices. SOLUTION: A standard image S is displayed on the display 21, and together with the standard image S, a plurality of particle images Z1 to Z6 are displayed simultaneously. The display region of each of the partial images Z1 to Z6, corresponds to a region enclosed by an enclosure line 22 in the standard image S. When the size of the enclosure line 22 is changed, the display region of each partial image is changed accordingly. When the enclosure line in the standard image S is moved arbitrarily, or the area thereof is arbitrarily changed with a mouse 19 or a keyboard 20, the state of a feature region of a sample can be observed through the comparison with the partial images.