发明名称 Semiconductor device
摘要 A semiconductor device which includes a capacitor wherein the capacitance of the capacitor can be prevented from being lowered even in the case that the capacitor is miniaturized. A core insulating film having the core of the capacitor formed above a semiconductor substrate, a capacitor lower electrode formed so as to cover side surfaces of this core insulating film, a capacitor dielectric film formed so as to cover the surface of this capacitor lower electrode and the upper surface of the core insulating film and a capacitor upper electrode formed so as to cover the surface of this core insulating film are provided so that the bottom surface of the core insulating film is positioned lower than the bottom surface of the capacitor lower electrode.
申请公布号 US2003015675(A1) 申请公布日期 2003.01.23
申请号 US20020196951 申请日期 2002.07.18
申请人 MITSUBISHI DENKI KABUSHIKI KAISHA 发明人 YUTANI AKIE
分类号 H01L27/108;H01L21/02;H01L21/8242;(IPC1-7):H01L29/861 主分类号 H01L27/108
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