METHOD AND APPARATUS FOR ADJUSTING CHARACTERISTICS OF ELECTRON SOURCE, AND METHOD FOR MANUFACTURING ELECTRON SOURCE

摘要

PURPOSE: Method and apparatus for adjusting characteristics of electron source, and method for manufacturing electron source are provided to enable the characteristics of a multi-electron source to be almost the same in a simple process by the use of properties peculiar to an electron-emitting device. CONSTITUTION: A method for adjusting characteristics of an electron source having a plurality of electron-emitting devices, the method comprising the step of: applying a pulse of a voltage for adjustment to an electron-emitting device to be adjusted one or more times according to a characteristic of the electron-emitting device; wherein: the voltage for adjustment is selected from a plurality of voltages having discrete values according to the characteristic of the electron-emitting device; and a number of applying times of the pulse is determined according to the characteristic of the electron-emitting device and the selected voltage.