Hermetically Sealed Magnetic Keeper Cathode

摘要

A sputtering cathode includes a magnet array having an outer, ring magnet surrounding an inner, disk magnet. A sputtering target is positioned on one side of the magnet array covering a side of the ring magnet and a side of the disk magnet, and a magnetic keeper disk is positioned between the sputtering target and the disk magnet. A cooling well positioned between the ring magnet and the disk magnet is in contact with part of the sputtering target. One or more cooling tubes is/are coupled to the cooling well. An outer body flange surrounds the one or more cooling tubes and contacts a side of the ring magnet opposite the sputtering target. An inner body flange, surrounded by the outer body flange, contacts a side of the disk magnet opposite the sputtering target. One or more insulators positioned between the ring magnet and the disk magnet couple the inner body flange, the outer body flange, and the one or more cooling tubes together in an operative relation, and electrically isolate the inner body flange, the outer body flange, and the one or more cooling tubes from each other to form an ultra-high vacuum seal without the use of one or more elastomer seals.

主权项

1. A sputtering cathode comprising:
a magnet array including an outer, ring magnet surrounding an inner, disk magnet; a sputtering target on one side of the magnet array covering a side of the ring magnet and a side of the disk magnet; a magnetic keeper disk between the sputtering target and the disk magnet; a cooling well between the ring magnet and the disk magnet, wherein the cooling well is in contact with the sputtering target; one or more cooling tubes coupled to the cooling well; an outer body flange surrounding the one or more cooling tubes and contacting a side of the ring magnet opposite the sputtering target; an inner body flange contacting a side of the disk magnet opposite the sputtering target; and one or more insulators positioned between the ring magnet and the disk magnet, the one or more insulators coupling the inner body flange, the outer body flange, and the one or more cooling tubes together in an operative relation, and electrically isolating the inner body flange, the outer body flange, and the one or more cooling tubes from each other without the use of one or more elastomer seals.