| 摘要 |
A piezoelectric-optic switch and method of fabrication therefor is provided. The switch includes a Mach-Zehnder interferometer having a pair of waveguides disposed in a planar substrate, and strips of piezoelectric material such as PZT disposed on a top surface of the substrate over each of the waveguides. The PZT material is electrophoretically deposited on the substrate to a thickness of between 10 and 20 microns and sintered, resulting in a high density on the order of 8 gm/cm3. The PZT strips deform the planar substrate surrounding the waveguides to an extent necessary to adjust the phase between optical signals transmitted through the waveguides, which in turn allows an optical coupler connected to the output of the waveguides to effect a signal cross-over.
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