| 摘要 |
<p>PROBLEM TO BE SOLVED: To achieve a high-speed mobility and high positioning accuracy of a stage device used for a semiconductor working operation or the like. SOLUTION: The stage device is provided with a movement stage 12 which is two-dimensionally driven by a plane liner motor in a state that it is levitated on a base 11 by a gas pressure, and a transverse-direction linear movement guide 13 and a longitudinal-direction linear movement guide 14 which independently guide the transverse side of the movement stage 12 and its longitudinal side at right angles to the transverse side. The movement stage 12 is guided by the movement guides 13, 14 so as to two-dimensionally movable.</p> |
