发明名称 Optisk registreringsapparat och metod därav
摘要 The spatial light modulators (SLMs) (48,50) perform amplitude and phase modulation of light received from a light source (34). An imaging lens (60) forms an image of the light transmitted through the modulators on a surface (28) of an object (26) to be exposed. An Independent claim is also included for optical recording method.
申请公布号 SE0202949(L) 申请公布日期 2003.04.20
申请号 SE20020002949 申请日期 2002.10.07
申请人 EKISHO SENTAN GIJUTSU KAIHATSU 发明人 TANIGUCHI YUKIO
分类号 G03F1/00;G03F7/20;H01L21/027 主分类号 G03F1/00
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