发明名称 |
Optisk registreringsapparat och metod därav |
摘要 |
The spatial light modulators (SLMs) (48,50) perform amplitude and phase modulation of light received from a light source (34). An imaging lens (60) forms an image of the light transmitted through the modulators on a surface (28) of an object (26) to be exposed. An Independent claim is also included for optical recording method. |
申请公布号 |
SE0202949(L) |
申请公布日期 |
2003.04.20 |
申请号 |
SE20020002949 |
申请日期 |
2002.10.07 |
申请人 |
EKISHO SENTAN GIJUTSU KAIHATSU |
发明人 |
TANIGUCHI YUKIO |
分类号 |
G03F1/00;G03F7/20;H01L21/027 |
主分类号 |
G03F1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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